SURFACE ACOUSTIC WAVE PROPAGATION SUPPRESSION STRUCTURE OF PIEZOELECTRIC DEVICE, PIEZOELECTRIC DEVICE, AND ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic wave type acceleration sensor capable of effectively suppressing mutual interference with other surface acoustic wave resonator due to leak from a surface acoustic wave resonator without facilities accompanied by application of a sound absorber and sound absorber management.SOLUTION: A surface acoustic wave propagation suppression structure 20 of a piezoelectric device 30 is intended to suppress propagation of a surface acoustic wave in the piezoelectric device 30 having surface acoustic wave resonators 11, 12 and 13 on a piezoelectric substrate 10. For example, a metal plated ground electrode 24 is provided between the surface acoustic wave resonator 11 and the surface acoustic wave resonator 12 that is an object for suppressing propagation of the surface acoustic wave excited from the resonator 11 as sound absorbing means having sound absorption effect.SELECTED DRAWING: Figure 1