| 发明名称 |
SENSOR AND ITS MANUFACTURING METHOD |
| 摘要 |
According to one embodiment, a sensor is disclosed. The sensor includes a substrate, a first fixed electrode arranged on the substrate, a movable electrode arranged above the first fixed electrode and being movable non-parallely, a second fixed electrode arranged above the movable electrode. The sensor further includes a detector to detect a difference between a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the movable electrode and the second fixed electrode. |
| 申请公布号 |
US2016187370(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201514836558 |
申请日期 |
2015.08.26 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
IKEHASHI Tamio |
| 分类号 |
G01P15/125;B81C1/00;B81B3/00 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sensor comprising:
a substrate; a first fixed electrode arranged on the substrate; a movable electrode arranged above the first fixed electrode and being movable non-parallely; a second fixed electrode arranged above the movable electrode; and a detector to detect a difference between a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the movable electrode and the second fixed electrode. |
| 地址 |
Tokyo JP |
