MICRO DEVICE TRANSFERRING APPARATUS, METHOD FOR TRANSFERRING MICRO DEVICE, AND METHOD FOR FABRICATING TRANSFERRING APPARATUS

摘要

A micro device transferring apparatus includes: a base; and a stamping array disposed on the base. The stamping array includes at least two transferring projections protruding from the base at a predetermined spacing therebetween. According to the present disclosure, the adhesion between a micro device and a target substrate can be enhanced, and the transferring apparatus can be used repeatedly and simply controlled so that the cost for handling the micro device can be saved. In addition, the positions of micro devices can be scaled in multiple dimensions, so that the micro devices can be mounted in a scalable manner.

主权项

1. A micro device transferring apparatus comprising:
a base; and a stamping array disposed on the base, wherein the stamping array comprises at least two transferring projections protruding from the base at a predetermined spacing therebetween.