发明名称 METHOD FOR FABRICATING A PATTERNED LAYER
摘要 The invention relates to a fabrication apparatus for fabricating a patterned layer (18) on a substrate (14). Protective material (17) is applied in second regions on the substrate (14) and liquid layer material (18) is then printed in first regions being different to the second regions on the substrate (14). The layer material (18) is dried by heating the layer material (18) to a drying temperature being smaller than a melting temperature of the protective material (17), before removing the protective material (17) from the substrate (14) by using a removing temperature being larger than the melting temperature of the protective material (17). A patterned layer (18) can therefore be produced, without using, for example, a costly photolithography process, and because of the use of the protective material (17) the layer material (18) is present in the desired first regions only and not in the second regions. This improves the quality of the patterned layer, which may be used for producing an OLED.
申请公布号 EP2715829(B1) 申请公布日期 2016.06.29
申请号 EP20120725503 申请日期 2012.05.09
申请人 OLEDWORKS GMBH 发明人 RICKERS, CHRISTOPH;KRUIJT, PIETER, GIJSBERTUS, MARIA
分类号 H01L51/56;H01L21/02;H01L51/52 主分类号 H01L51/56
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