| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust gas treatment apparatus capable of reducing an installation space, initial costs and running costs by integrating an exhaust gas treatment function with a dust collecting function.SOLUTION: An exhaust gas treatment apparatus 1 for treating exhaust gas to be discharged from a single crystal pulling apparatus 2 includes: a detoxification device 3 having a first chamber 31 to which a discharge conduit 21 of exhaust gas is connected, a first water spray means 32 disposed inside the first chamber for spraying water to the inside of the first chamber, and a tank 33 disposed at the lower part of the first chamber for receiving water sprayed by the first water spray means; a dust treatment apparatus 4 having a second chamber 41 to whose upper part a dust collection conduit 61 for collecting dusts is connected and second water spray means 42 disposed inside the second chamber for spraying water to the inside of the second chamber; and a blower 5 connected via a conduit 51 to the first chamber for discharging gas inside the first chamber to the outside. The dust treatment apparatus is characterized in that the lower part of the second chamber communicates with the inside of the tank. |
