| 摘要 |
A flow sensor (1) comprising at least one sensitive area (3) for measuring a fluid flow flowing in a main flow direction (2) over said sensitive area (3), the flow sensor (1) further comprising a sensor substrate (4), the sensor substrate (4) having at least one cavity (90). Said flow sensor (1) further comprises at least one membrane (5), the membrane (5) being spanned over the cavity (90) and carrying at least one sensing element (6), wherein the sensitive area (3) is part of the membrane (5). Said sensor (1) further comprises a screening structure (7;71,72,73;74,75;76), the screening structure (7;71,72,73;74,75;76) being configured, owing to its shape, its material and/or its placement relative to the sensitive area (3), to at least partly electrically and/or physically screen the sensitive area (3) from deposition of particles (8) carried in said fluid flow. |
