发明名称 UPPER POLYIMIDE STACKING FLEXIBLE SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
摘要 The present invention relates to an upper PI stack flexible substrate and a manufacturing method thereof. More specifically, in the upper PI stack flexible substrate, a PI coating layer is formed on an upper portion of a PDMS layer in consideration of features of PI with low stretchability and a low thermal expansion coefficient and a demerit of PDMS with high stretchability and a low processing feature.
申请公布号 KR101634091(B1) 申请公布日期 2016.06.29
申请号 KR20150181582 申请日期 2015.12.18
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 KIM, YONG JIN;LEE, JAE HAK;SONG, JOON YUB;KIM, SEUNG MAN;LEE, CHUNG WOO
分类号 G02F1/1333;H01L21/02;H01L21/311;H01L51/00 主分类号 G02F1/1333
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