| 摘要 |
PROBLEM TO BE SOLVED: To easily discriminate between a pseudo error and a true error.SOLUTION: A verification device 1 includes a formation unit 1a for forming evaluation lines 7a-7d to identify whether it is a violation of a verification object on the basis of the shapes of mask patterns 2b-2e including a place in violation of a layout design rule, and a determination unit 1b that determines the presence or absence of interference of the evaluation lines 7a-7d formed by the formation unit 1a, and outputs the determination results. |
