| 摘要 |
PROBLEM TO BE SOLVED: To provide a microvoid forming method by which a microvoid of high size precision in a stable shape can be obtained, and productivity is improved by preventing deterioration in quality of a circumference of the microvoid.SOLUTION: A microvoid forming method includes a laser processing step of forming a continuous modified region 11 which is not exposed to the outside in a workpiece 10 by irradiating the workpiece 10 with converged pulse laser light (a), a machining step of forming an exposed portion 11a in the modified region 11 by removing a part of the workpiece 10 by machining, and an etching step of forming a microvoid 12 by etching the modified region 11 away with the exposed portion 11a as a starting point. |
