| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode structure with no fear of surface discharge to a workpiece and moreover with little ultraviolet beam irradiation to the workpiece. <P>SOLUTION: In the plasma surface treatment device in which discharged plasma, obtained by introducing a treatment gas between a voltage impressing electrode 6 and a grounding electrode 7 at a pressure near the atmospheric pressure and impressing a high frequency electric field, is introduced on a treatment substrate w arranged outside a discharge space G and is surface-treated, the voltage impressing electrode 6 has a structure in which a metal electrode 61 is inserted inside a solid dielectric 62 which is mold-formed as one body of a circular cylindrical shape, and the ground electrode 7 is composed of a pair of metal electrodes 71, 71 having an electrode opposing face 7a of an arc-shaped cross-section corresponding to an outer circumferential surface of the voltage impressing electrode 6, and the electrode opposing faces 7a, 7a of the pair of the metal electrodes 71, 71 are arranged horizontally to oppose parallel to the outer circumferential face of the voltage impressing electrode 6 respectively. <P>COPYRIGHT: (C)2011,JPO&INPIT |
