发明名称 APPARATUS FOR SUPPLYING EVAPORATION MATERIAL
摘要 According to an aspect of the present invention, an apparatus for supplying evaporation material is provided. The apparatus includes: a storage disk for storing an evaporation material and having a plurality of storing holes radially arranged about a virtual rotary axis; a bottom plate on which the storage disk is rotatably engaged about the rotary axis, and which is formed with an inserting hole thereon to communicate with one of a plurality of the storage holes according to a rotation of the storage disk; and a spacer unit interposed between the bottom plate and the storage disk for spacing the storage disk apart from the bottom plate. The apparatus enables the storage disk to smoothly rotate, thereby smoothly supplying the evaporation material.
申请公布号 KR20160075244(A) 申请公布日期 2016.06.29
申请号 KR20140184992 申请日期 2014.12.19
申请人 SUNIC SYSTEM. LTD. 发明人 KIM, YOUN HO;CHAE, KYEONG SU
分类号 H01L51/56;H01L21/203 主分类号 H01L51/56
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