OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT

摘要

A variable wavelength interference filter (5) is fixed to a base (62), and fixing material (64) fixes at least one of the substrates (51,52) of the interference filter (5) to the base via at least one location of one surface side along a substrate thickness direction. A first order resonance frequency of the variable wavelength interference filter in which a fixing position of the fixing material is used as a fixed end is less than or equal to half a value of a first order resonance frequency of the movable section.