摘要 |
PROBLEM TO BE SOLVED: To provide an oscillation element the outer shape and grooves of which can be formed by single wet etching, while reducing the crystal impedance.SOLUTION: An oscillation element 10 includes a base 11, two oscillation arms 12a, 12b extending from the base 11 in the same direction, a groove 13a having a first groove surface 131a and a second groove surface 132a drilled in the oscillation arm 12a in the longitudinal direction (-Y' axis direction) thereof and facing each other, and a groove 13b having a first groove surface 131b and a second groove surface 132b drilled in the oscillation arm 12b in the longitudinal direction (-Y' axis direction) thereof and facing each other. |