发明名称 水晶振動素子及びその製造方法
摘要 PROBLEM TO BE SOLVED: To provide an oscillation element the outer shape and grooves of which can be formed by single wet etching, while reducing the crystal impedance.SOLUTION: An oscillation element 10 includes a base 11, two oscillation arms 12a, 12b extending from the base 11 in the same direction, a groove 13a having a first groove surface 131a and a second groove surface 132a drilled in the oscillation arm 12a in the longitudinal direction (-Y' axis direction) thereof and facing each other, and a groove 13b having a first groove surface 131b and a second groove surface 132b drilled in the oscillation arm 12b in the longitudinal direction (-Y' axis direction) thereof and facing each other.
申请公布号 JP5941802(B2) 申请公布日期 2016.06.29
申请号 JP20120208713 申请日期 2012.09.21
申请人 京セラクリスタルデバイス株式会社 发明人 井上 憲司;根岸 満彦;森嶋 真一;木崎 茂
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H03H3/02;H03H9/215 主分类号 H03H9/19
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