| 摘要 |
PROBLEM TO BE SOLVED: To provide a distortion detector capable of detecting a distortion in a very small area at a high sensitivity.SOLUTION: According to an embodiment, a distortion detector comprises a semiconductor circuit part and a detection part. The semiconductor circuit part has a semiconductor substrate and a transistor that is provided on the semiconductor substrate. The detection part is provided on the semiconductor circuit part. The detection part has a cavity part that is provided above the transistor, and a non-cavity part that is arranged in parallel with the cavity part. The detection part has a movable beam, a distortion detection element part, and first and second wirings. The movable beam has a fixed part that is fixed to the non-cavity part, and a movable part that extends from the fixed part to the cavity part and is separated from the transistor and in which a distance to the transistor is variable. The distortion detection element part is provided in the movable part and includes first and second magnetic layers and a non-magnetic intermediate layer. Each of the first and second wirings are provided in the non-cavity part and electrically connect the first and second magnetic layers and the semiconductor circuit part. |
