发明名称 CORROSION AND DEPOSITION PROTECTED VALVE APPARATUS AND METHOD
摘要 An expandable and contractible shield around a bellows in a valve protects the bellows from corrosive gases and solid particles in the valve chamber. In a manifold valve assembly with multiple outlet ports and multiple valves in a common valve chamber, a respective expandable and contractible shield around each respective bellows of each respective valve in the assembly separates each bellows from corrosive gases and solid particles in the common valve chamber regardless of whether one or all of the valves in the assembly is opened or closed.
申请公布号 EP2912358(A4) 申请公布日期 2016.06.29
申请号 EP20130849699 申请日期 2013.10.23
申请人 MKS INSTRUMENTS, INC. 发明人 NEUMEISTER, DAVID;LEFEVRE, BRADLY;GROUT, KEVIN;GU, YOUFAN
分类号 F16K41/10;F16K27/00;F16K31/122 主分类号 F16K41/10
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