CLEANING LIQUID, METHOD OF CLEANING PIPELINE OF FILM FORMING APPARATUS BY COATING

摘要

PROBLEM TO BE SOLVED: To provide a cleaning liquid capable of cleaning and removing a siloxane gel deposited and adhered in a pipeline of a film forming apparatus by coating which is derived from a silicon-containing film material such as a silicon-containing resist under layer film material, and not generating precipitates and pipeline clog even if contacting with an organic material in the film forming apparatus by coating.SOLUTION: The cleaning liquid used when removing a siloxane gel adhered in a pipeline of a film forming apparatus by coating comprises an alcohol solution of tetraalkylammonium hydroxide or choline.SELECTED DRAWING: None