| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnet chuck device which holds a processed object on a backing plate with a stronger magnetic force.SOLUTION: A magnet chuck device (1) has: a shoe support part (8) attached to a base (2); a shoe (9) which is attached to the shoe support part (8) and rotatably supports a processed object (W) held by a backing plate (7) when the processed object (W) is held by the backing plate (7); and a flux guide (10) which is attached to the shoe support part (8) and faces the processed object (W) held by the backing plate (7) when the processed object (W) is held by the backing plate (7). The shoe (9) is made of a nonmagnetic material. Further, the base (2), a spindle (5), the backing plate (7), the shoe support part (8), and the flux guide (10) are made of a magnetic material.SELECTED DRAWING: Figure 1 |
