| 摘要 |
PROBLEM TO BE SOLVED: To provide a photo-curable composition for nanoimprinting, excellent in dispersion stability, cured rapidly by photo-irradiation, and capable of forming a cured product which can detect easily fine pattern defects using an automatic optical substrate inspection device or the like.SOLUTION: A photo-curable composition for nanoimprinting of the present invention contains the following component (a), component (B) and component (C). Component (A): a cationic curable compound containing a compound represented by the following formula (a-1); Component (B): a metal complex of a heterocyclic compound having a tetraazaporphyrin skeleton; and Component (C): a photo cationic polymerization initiator.SELECTED DRAWING: None |
