PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION METHODS

摘要

A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure.

主权项

1. A micro-electrical-mechanical system (MEMS) guided wave device comprising:
a single crystal piezoelectric layer; a plurality of electrodes arranged in or on the single crystal piezoelectric layer and configured for transduction of a lateral acoustic wave in the single crystal piezoelectric layer; and at least one guided wave confinement structure arranged proximate to the single crystal piezoelectric layer and configured to confine a laterally excited wave having a wavelength λ in the single crystal piezoelectric layer, wherein each guided wave confinement structure of the at least one guided wave confinement structure comprises a thickness of less than 5λ, and the at least one guided wave confinement structure comprises a fast wave propagation layer.