发明名称 THIN FILM TRANSISTOR AND ORGANIC LIGHT-EMITTING DISPLAY
摘要 A thin film transistor including: a substrate; an active layer formed over the substrate; a gate insulating layer formed over the active layer; a gate electrode formed over the gate insulating layer; an interlayer insulating layer formed over the gate electrode; and source and drain electrodes that contact the active layer via the interlayer insulating layer. The source and drain electrodes may have a structure including an aluminum (Al) layer, an aluminum-nickel alloy (AlNiX) layer, and an indium tin oxide (ITO) layer, which are sequentially stacked.
申请公布号 US2016181387(A1) 申请公布日期 2016.06.23
申请号 US201615054037 申请日期 2016.02.25
申请人 Samsung Display Co., Ltd. 发明人 Kim Jong-Yoon;Lee Il-Jeong;Im Choong-Youl;Kwon Do-Hyun
分类号 H01L29/45;H01L27/12;H01L27/32;H01L29/786 主分类号 H01L29/45
代理机构 代理人
主权项 1. A thin film transistor comprising: a substrate; an active layer formed over the substrate and comprising a silicon layer having a nitrated surface; a gate insulating layer formed over the active layer; a gate electrode formed over the gate insulating layer; an interlayer insulating layer formed over the gate electrode; and source and drain electrodes that contact the active layer through openings in the interlayer insulating layer and comprise an aluminum-nickel alloy (AlNiX) layer and an indium tin oxide (ITO) layer, which are sequentially stacked.
地址 Yongin-City KR