发明名称 METHOD FOR PRODUCING TWO-DIMENSIONALLY PATTERNED CARBON NANOTUBE AND TWO-DIMENSIONALLY PATTERNED CARBON NANOTUBE
摘要 Disclosed are a method for producing a carbon nanotube (CNT) whereby, in the local synthesis of CNTs, a high resolution, a low cost, easiness in production and mass production capability can be established at the same time; and a two-dimensionally patterned CNT obtained thereby.
申请公布号 US2016176712(A1) 申请公布日期 2016.06.23
申请号 US201615045122 申请日期 2016.02.16
申请人 The University of Tokyo 发明人 Maruyama Shigeo;Xiang Rong
分类号 C01B31/02;G03F7/40;G03F7/20 主分类号 C01B31/02
代理机构 代理人
主权项 1. A method for producing a two-dimensionally patterned carbon nanotube, comprising the steps of: A) preparing a substrate; B) 1) covering the substrate with a mask and irradiating the substrate with an electromagnetic wave through the mask, in the presence or absence of electromagnetic wave irradiation with or without the mask, or 2) irradiating the substrate with an electron beam in the presence or absence of the electron beam irradiation, to form a first two-dimensional pattern consisting of a hydrophobic surface and a hydrophilic surface on a surface of the substrate; C) applying a catalyst-containing liquid on the substrate having the first two-dimensional pattern, to form a second two-dimensional pattern, depending on the presence or absence of the catalyst, wherein the hydrophilic surface retains the catalyst and the hydrophobic surface does not retain the catalyst; and D) forming a carbon nanotube on the resulting substrate by chemical vapor deposition under the presence of a carbon source, wherein the carbon nanotube is formed on the surface retaining the catalyst and any carbon nanotube is not formed on the surface which does not retain the catalyst.
地址 Tokyo JP