| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of providing at least one of advantages of overcoming low pump housing temperature and high gas load during an operation of the vacuum pump, being usable under high ambient temperature, and having low consumption of electric output.SOLUTION: In a vacuum pump having at least one pump mechanism for pumping a gas along a pump channel 10 from an inlet 70 to an outlet of the vacuum pump, in particular, a turbo molecular pump, the pump channel is shifted through at least one first clearance 83a, 83b, 83c, and in the clearance, a pumping function is exerted during the operation of the vacuum pump. At least one second clearance 85a is disposed, and in the clearance, the pumping function is not exerted during the operation of the vacuum pump, and preferably the pump channel is shifted through the second clearance. The second clearance is larger than the first clearance for at least a certain factor.SELECTED DRAWING: Figure 1 |
