发明名称 PROTECTIVE TAPE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
摘要 A protective tape and a method for manufacturing a semiconductor device using the same capable of achieving excellent connection properties. The protective tape includes an adhesive layer, a thermoplastic resin layer and a backing material film in that order; a modulus ratio of a shear storage modulus of the adhesive layer to a shear storage modulus of the thermoplastic resin layer at an application temperature at which the protective tape is applied is 0.01 or less. This suppresses resin residue on bumps thereby achieving excellent connection properties.
申请公布号 US2016181140(A1) 申请公布日期 2016.06.23
申请号 US201414761913 申请日期 2014.08.18
申请人 DEXERIALS CORPORATION 发明人 MORIYAMA Hironobu;DEGUCHI Shingo;YAGI Hidekazu;ISHIMATSU Tomoyuki
分类号 H01L21/683;H01L21/78;H01L23/31;H01L21/304 主分类号 H01L21/683
代理机构 代理人
主权项 1. A protective tape comprising an adhesive layer, a thermoplastic resin layer and a backing material film layer in that order; wherein a modulus ratio of a shear storage modulus of the adhesive layer to a shear storage modulus of the thermoplastic resin layer at an application temperature at which the protective tape is applied is 0.01 or less.
地址 Tokyo JP
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