Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode

摘要

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

主权项

1. A method of operating a scanning probe microscope, the method comprising:
providing an atomic force microscope (AFM) including a probe having a tip, wherein the material of the entire tip is homogeneous; providing relative scanning motion between the probe and a sample causing the probe to interact with the sample; and operating the AFM to collect topography data, mechanical property data and electrical property data with the probe in one of a group including a single pass procedure and a two pass procedure.