发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device that can perform dressing of a cutting blade in a comparatively short time.SOLUTION: The cutting device comprises: a base; a chuck table that holds a work-piece by a holding surface; cutting means that has a spindle to be rotation-driven and a cutting blade fitted to a tip part of the spindle, and cuts the work-piece held by the chuck table; Y-axis moving means that moves the spindle in a Y-axis direction parallel to a rotary shaft of the spindle; Z-axis moving means that moves the spindle in a Z-axis direction, a direction in which the spindle approaches and separates from the holding surface of the chuck table; and X-axis moving means that moves the chuck table in an X-axis direction, being a cutting/feeding direction orthogonal to the Y-axis direction and the Z-axis direction, which further comprises dress board supporting means fixed to the base just below the spindle on a movement passage of the cutting blade by the Y-axis moving means. The cutting blade cuts-in the dress board supported by the dress board supporting means by the Z-axis moving means, so as to perform dressing of the cutting blade.SELECTED DRAWING: Figure 3
申请公布号 JP2016112674(A) 申请公布日期 2016.06.23
申请号 JP20140255792 申请日期 2014.12.18
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUYAMA TOSHIFUMI
分类号 B24B53/00;B24B27/06;B24B49/12;H01L21/301 主分类号 B24B53/00
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