| 摘要 |
When a measurement target region on a sample is set (S1), the need for division of the measurement target region is determined according to division conditions, such as the maximum data size of a file (S2-S3). If the measurement target region is large and needs to be divided, the measurement target region is divided into a plurality of small regions (S4) according to the division conditions. When measurement is started, in each small region, mass analysis is sequentially conducted at measurement points included in that small region (S10). Once measurement at one small region is completed, a data file in which that measurement data is stored is created and is saved in an external storage device (S11). By repeating this for all of the small regions, the same number of data files as the number of small regions are saved in the external storage device. When creating an imaging image, the required data in each data file is read out, an imaging image corresponding to the small region is created, and by joining a plurality of them together, an imaging image for the entire measurement target region is created. Accordingly, the size of the data files decreases, thus facilitating file handling and also reducing the load on hardware and so forth. |
