Method of analyzing a sample and charged particle beam device for analyzing a sample

摘要

The invention refers to a method and a charged particle beam device (1) for analyzing an object (24) using a charged particle beam interacting with the object (24). The object (24) comprises a sample (15A) embedded in a resin (15B). Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin (15B) is arranged and in which the sample (15A) is arranged. Interaction particles are detected to identify particles within the resin (15B) and the sample (15A) for further analysis by using EDX analysis.