| 摘要 |
According to an embodiment of the present invention, a rotation detecting sensor comprises: a fixing unit prepared to be separated from a mass; a first flexible unit connecting the mass and the fixing unit in one direction; a second flexible unit connecting the mass and the fixing unit in an other direction perpendicular to the one direction; and membranes connecting the mass and the fixing unit, prepared to be spaced from each other such that the second flexible unit is prepared therebetween. As such, a signal noise is able to be reduced, and a sensitivity improved. |
