发明名称 パワーモジュール製造方法
摘要 Provided is a lead-free bonding technique having both excellent heat radiation performance properties and a substrate bonding part with excellent bonding performanceproperties. A semiconductor element is bonded, using a sinter-type Ag paste, to a ceramic substrate having pure copper wiring (where the porous Ag layer has a porosity of 5% to less than 30%). Then, hydrogen reduction is performed, and the ceramic substrate is bonded to the base using an Sn-based solder having a solidus temperature equal to or greater than 227°C (fig. 8).
申请公布号 JP5936407(B2) 申请公布日期 2016.06.22
申请号 JP20120069419 申请日期 2012.03.26
申请人 株式会社日立製作所 发明人 池田 靖;手呂内 俊郎;守田 俊章
分类号 H01L25/07;H01L21/52;H01L25/18 主分类号 H01L25/07
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