发明名称 |
Adaptive radiation filter and its use |
摘要 |
An adaptive radiation filter comprises an elastomeric film, which is stretchable by application of an electric field or a magnetic field. The surface(s) of the elastomeric film comprises partial radiation absorber expandable coating. The elongation-surface distribution of radiation absorber is variable in coating. Independent claims are included for the following: (1) beam diaphragm; and (2) use of adaptive beam filter. |
申请公布号 |
EP2736046(A3) |
申请公布日期 |
2016.06.22 |
申请号 |
EP20130190468 |
申请日期 |
2013.10.28 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BÖSE, HOLGER;RABINDRANATH, RAMAN |
分类号 |
G21K1/10;G02B5/20;G02B5/22;G02B26/02;H01L41/193 |
主分类号 |
G21K1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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