发明名称 Adaptive radiation filter and its use
摘要 An adaptive radiation filter comprises an elastomeric film, which is stretchable by application of an electric field or a magnetic field. The surface(s) of the elastomeric film comprises partial radiation absorber expandable coating. The elongation-surface distribution of radiation absorber is variable in coating. Independent claims are included for the following: (1) beam diaphragm; and (2) use of adaptive beam filter.
申请公布号 EP2736046(A3) 申请公布日期 2016.06.22
申请号 EP20130190468 申请日期 2013.10.28
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 BÖSE, HOLGER;RABINDRANATH, RAMAN
分类号 G21K1/10;G02B5/20;G02B5/22;G02B26/02;H01L41/193 主分类号 G21K1/10
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