METHOD FOR SENSING AND SENSOR

摘要

The invention relates to a method for the optomicromechanical path detection, for signal conversion and modification, and to transducers operating according to said method. For this purpose, a thin planar aperture element is used, which can be moved relative to the surroundings and relative to defined light or radiation zones. Using specially formed passages, said element allows more or less light or comparable electromagnetic radiation to pass depending on the position. The radiation component (the luminous flux) traveling through the passages forms a function that is dependent on the relative position or the relative angular position of the aperture element to the radiation zones. A photo or radiation detector can convert the impinging radiant flux into electrical signals. The measured variables can be paths or angles, accelerations, forces, electrically or magnetically induced movements or pressure. It is possible to measure electric or magnetic field intensities, electric voltages or currents that are converted into movements via active capacitive or inductive actuators.