| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate adjustment device capable of quickly adjusting a flow rate with a simple configuration.SOLUTION: A flow rate adjustment device 10 has a first branch path 11 having a first change-over valve 12 and a first flow rate regulating valve 13 connected in series, a second branch path 15 having a second change-over valve 16 and a second flow rate regulating valve 17 connected in series and installed in parallel with the first branch path 11, and a controller 30 for controlling drive of the first change-over valve 12, the first flow rate regulating valve 13, the second change-over valve 16 and the second flow rate regulating valve 17. The controller 30 performs control so as to perform advance adjustment for adjusting a desired flow rate in the first flow rate regulating valve 13 in a standby state with the first change-over valve 12 closed in advance, and to perform advance adjustment for adjusting a desired flow rate in the second flow rate regulating valve 17 in a standby state with the second change-over valve 16 closed in advance. |
