发明名称 合成石英ガラススート体の製造方法及び透明合成石英ガラスインゴットの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a synthetic quartz glass soot body having a uniform refraction factor and no inflection point in OH group concentration distribution, without practicing calcination or the like.SOLUTION: A method for manufacturing a synthetic quartz glass soot body by radiating grown flame to a seed rod to deposit glass particles thereon includes an initial stage where the diameter of the synthetic quartz glass soot body is increased by depositing the glass particles on the seed rod, and a steady stage where the diameter of the synthetic quartz glass soot body is not changed even by depositing the glass particles on the seed rod. Temperature difference is 50°C or less in a flame-exposed surface area of the synthetic quartz glass soot body within a radius of 80% from a rotation axis of the synthetic quartz glass soot body in the steady stage. The flame-exposed surface area is a part of a whole flame-exposed surface area exposed to the grown flame radiated from a concentric multiple tube burner.
申请公布号 JP5939682(B2) 申请公布日期 2016.06.22
申请号 JP20120242066 申请日期 2012.11.01
申请人 信越石英株式会社 发明人 角 児太郎;水上 博公;江崎 正信;横田 透
分类号 C03B8/04;G02B3/00;H01L21/027 主分类号 C03B8/04
代理机构 代理人
主权项
地址