| 摘要 |
PROBLEM TO BE SOLVED: To detect a substrate on a pick on a transfer arm only by an imaging apparatus provided above a base of the transfer arm.SOLUTION: A substrate transfer system includes: a mirror unit supported rotatably with a transfer arm 210 and having at least a pick side unit 304 including a pick side mirror 310 arranged on a pick side and a base side unit 306 having a base side mirror 312 arranged on a base side, in which the pick side mirror is arranged so as to reflect an image including peripheral edge of a wafer W held in the pick toward the base side and the base side mirror is arranged so as to reflect an image from the pick side mirror toward over the base; and an imaging apparatus 130 provided above the base so that an image from the base side mirror is included in an imaging region, and detects a substrate condition on the basis of the image fetched from the imaging apparatus. |
