发明名称 切削ブレードの刃先位置検出方法
摘要 PROBLEM TO BE SOLVED: To provide a cutting blade tip position detection method capable of detecting a tip position of a cutting blade in a short period of time.SOLUTION: The cutting blade tip position detection method in a cutting device provided with a chuck table, cutting means with a cutting blade 21 attached thereto, cut feeding means, and a blade tip detection means includes a rough detection step for moving a cutting blade in a cut feeding direction from a first origin Z01 toward the blade tip detection means at a first velocity V1, decelerating to a second velocity V2 at a first velocity change position Z11, and making the cutting blade intrude between a light emitting part and a light receiving part of the blade tip detection means to detect the cutting blade, and a precise detection step for moving the cutting blade in a cut feeding direction from a second origin Z02 at a third velocity V3 after the rough detection step, further decelerating to a fourth velocity V4 at a second velocity change position Z12, and making the cutting blade go into between the light emitting part and the light receiving part of the blade tip detection means to detect the cutting blade.
申请公布号 JP5936923(B2) 申请公布日期 2016.06.22
申请号 JP20120126428 申请日期 2012.06.01
申请人 株式会社ディスコ 发明人 久保 雅裕;和泉 邦治;神垣 政圭
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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