| 摘要 |
The present disclosure relates to a variable high voltage pulsed power supply, which is a switch-mode power supply that obtains high voltage pulsed power through power semiconductors built in multiple stages, thereby supplying pulsed power having a pulse voltage and a pulse width that vary depending on requirements by a load device, and an improved pulse repetition rate. The variable high voltage pulsed power supply using power semiconductors includes: an input power generation unit converting RF power into an RF alternating current and then into DC power; a power semiconductor switching unit charging a capacitor for charging with input power and discharging the same; a high voltage generation unit having a structure connecting the power semiconductor switching units in multiple stages, and allowing the capacitance of the charged capacitor and the voltage of the input power to increase according to the number of stages connected; and a controller controlling the power semiconductor switching units in each of the stages at the same time, and driving a gate by processing an optical signal to cut off surrounding noise. |
