ORGANOAMINOSILANES AND METHODS FOR MAKING SAME

摘要

Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.

主权项

1. A method for preparing a compound selected from an organoaminosilane, an organoaminodisilane, and an organoaminocarbosilane, the method comprising the steps of:
reacting an imine having a formula R—N═CR′R″ wherein R, R′ and R″ are each independently selected from hydrogen, a C1-10 linear alkyl group, a C3-10 branched alkyl, a C3-10 cyclic alkyl group, a C2-10 alkenyl group, a C4-10 aromatic group, a C4-10 heterocyclic group, a C1-10 linear organoamino group, a C2-10 branched organoamino group, a silyl group, a C1-10 linear carbosilyl group, and a C2-10 branched carbosilyl group, wherein at least one of R′ and R″ or R and R′, or none of R′ and R″ or R and R′ are be linked to form a substituted or unsubstituted cyclic ring and a silicon source comprising a hydridosilane in the presence of a catalyst under reaction conditions sufficient for the imine and silicon source to react and provide the compound.