发明名称 光学部材位置調整装置、投影光学系及びその調整方法、並びに露光装置
摘要 <P>PROBLEM TO BE SOLVED: To adjust the positional relation of optical members in an optical system easily and efficiently. <P>SOLUTION: The position adjustment device of optical member includes a first support 54A1 for supporting a lens 36A, a second support 54A2 coupled with the first support 54A1 via elastic hinges 55A, 55B arranged in a first direction R1, a third support 54A3 coupled with the second support 54A2 via elastic hinges 55C, 55D arranged in a second direction R2, and first and second drive mechanisms which rotate the first support 54A1 and the second support 54A2, respectively, in the first direction R1 and the second direction R2 for the third support 54A3. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5935975(B2) 申请公布日期 2016.06.15
申请号 JP20110248244 申请日期 2011.11.14
申请人 株式会社ニコン 发明人 西川 仁;高津 将彦;中村 貴
分类号 G03F7/20;G02B7/02 主分类号 G03F7/20
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