发明名称 ウルツ鉱型結晶膜およびその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a wurtzite type crystal film which has an easily controllable polarity distribution ratio while maintaining a high electrical resistivity so as to be applied to piezoelectric films or the like, and which is inexpensively deposited on a base material having a large surface area, and to provide a method for producing the wurtzite type crystal film.SOLUTION: The wurtzite type crystal film has a film structure including a bonding layer in which two or more particles are filled and stacked in the direction vertical to a base material surface, the particles being bonded with one another. Each particle includes a compound having a wurtzite type crystal structure, doped with at least one element selected from the element group comprising alkali metal elements and alkaline-earth elements. The method for producing the wurtzite type crystal film includes a process for applying a chemical solution containing elemental species constituting the wurtzite type crystal and a metal species to be doped, onto a base material.
申请公布号 JP5936028(B2) 申请公布日期 2016.06.15
申请号 JP20110251901 申请日期 2011.11.17
申请人 国立研究開発法人産業技術総合研究所 发明人 長瀬 智美;秋山 守人;蒲原 敏浩;西久保 桂子;深町 悟;菖蒲 一久
分类号 C30B29/16;C04B35/00;C04B35/453;C30B5/02 主分类号 C30B29/16
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