| 摘要 |
Disclosed is a dark field illumination apparatus which emits light to an object to obtain a dark field image for the object. The dark field illumination apparatus comprises: housings which are detachably combined with each other to form a ring shape, and illumination units which are installed in the housings respectively and emits light to the object. At this time, a cooling flow path for providing a cooling fluid is formed in each of the housings. External cooling fins for heat dissipation are formed on the outer surface of each of the housings. So, the generation of the heat of the illumination apparatus can be effectively prevented. |
