| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adhesive layer drying method capable of preventing gas emissions from an adhesive layer used for an electrostatic chuck device to be cooled by a cooling medium such as liquid nitrogen. <P>SOLUTION: There is provided a method for drying adhesive layers used for an electrostatic chuck device to be cooled by a cooling medium. In the drying method, a baking is performed at a temperature from 120°C to 140°C in an inert atmosphere until an emission of gas with prescribed mass number (15, 90, 121 and 163) from the adhesive layers is stopped. In other words, the emission of gas with prescribed gas number can be eliminated by baking and drying the adhesive layer for 2 hours to 8.5 hours. <P>COPYRIGHT: (C)2013,JPO&INPIT |
