发明名称 |
INTERCONNECT ARRANGEMENT WITH STRESS-REDUCING STRUCTURE AND METHOD OF FABRICATING THE SAME |
摘要 |
Provided are embodiments of a semiconductor device structure and a method for manufacturing the same. The semiconductor device structure includes a substrate, and a first layer formed on the substrate. The semiconductor device structure further includes a stress reducing structure formed on the first layer, and a portion of the first layer is surrounded by the stress reducing structure. The semiconductor device structure further includes a conductive feature formed on the portion of the first layer surrounded by the stress reducing structure. |
申请公布号 |
KR20160068720(A) |
申请公布日期 |
2016.06.15 |
申请号 |
KR20160068788 |
申请日期 |
2016.06.02 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIN YI RUEI;PENG YEN MING;YANG HAN WEI;LAI CHEN CHUNG |
分类号 |
H01L21/768;H01L21/02 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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