发明名称 INTERCONNECT ARRANGEMENT WITH STRESS-REDUCING STRUCTURE AND METHOD OF FABRICATING THE SAME
摘要 Provided are embodiments of a semiconductor device structure and a method for manufacturing the same. The semiconductor device structure includes a substrate, and a first layer formed on the substrate. The semiconductor device structure further includes a stress reducing structure formed on the first layer, and a portion of the first layer is surrounded by the stress reducing structure. The semiconductor device structure further includes a conductive feature formed on the portion of the first layer surrounded by the stress reducing structure.
申请公布号 KR20160068720(A) 申请公布日期 2016.06.15
申请号 KR20160068788 申请日期 2016.06.02
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LIN YI RUEI;PENG YEN MING;YANG HAN WEI;LAI CHEN CHUNG
分类号 H01L21/768;H01L21/02 主分类号 H01L21/768
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