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发明名称
基板の製造方法、および、ナノインプリントリソグラフィ用テンプレートの製造方法
摘要
申请公布号
JP5935453(B2)
申请公布日期
2016.06.15
申请号
JP20120081480
申请日期
2012.03.30
申请人
大日本印刷株式会社
发明人
平加 貴昭;吉田 幸司;佐々木 志保
分类号
H01L21/027;B81C99/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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