Stationary vibration insulation system and method for regulating a vibration insulation system

摘要

The system has a load (2) mounted on a base (4) in a horizontal and vertical direction in a vibration-insulated manner and comprising a moving mass i.e. displaceable table. The load is coupled to the base via a damper (9) that is effective in the horizontal direction, where the damper contains fluid e.g. non-Newtonian fluid, of variable viscosity. An active control detects motion of the mass and controls the viscosity of the fluid. Sensors detect vibrations of the load and/or of ground, and an actuator actively reduces vibrations, where the actuator is designed as a magnetic actuator. The sensors are designed as a position sensor or acceleration sensor. An independent claim is also included for a method for controlling a vibration isolation system.