A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system.
申请公布号
EP2837460(A3)
申请公布日期
2016.06.15
申请号
EP20140162424
申请日期
2014.03.28
申请人
SAMSUNG DISPLAY CO., LTD.
发明人
KIM, JOON HYUNG;LEE, HAE SOOK;KIM, SUNG GON;JEONG, IL YOUNG;HAN, GYOO WAN;RYU, JE KIL;CHO, KYOUNG SEOK