发明名称 |
POLISHING TOOL AND PROCESSING METHOD FOR MEMBER |
摘要 |
The present invention relates to a method for polishing an object having a certain shape and, more particularly, to a polishing method using a polishing tool provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to efficiently and uniformly polish the curved surface of the object. A polishing tool of the present invention is provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object. The polishing pad preferably has a Shore A hardness of 5 or greater and a surface formed by at least one of a cloth, a non-woven fabric, a resin processed non-woven fabric, synthetic leather, synthetic resin foam, and a composite thereof. A polishing method of the present invention uses a polishing tool including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object and polish the curved surface of the object. |
申请公布号 |
EP3031577(A1) |
申请公布日期 |
2016.06.15 |
申请号 |
EP20140834968 |
申请日期 |
2014.08.06 |
申请人 |
FUJIMI INCORPORATED |
发明人 |
OTSUKI, SHINGO;MORINAGA, HITOSHI;TAMAI, KAZUSEI;ASANO, HIROSHI;ITOU, YUUICHI;TAGUCHI, SOUMA |
分类号 |
B24B9/00;B24B37/11;B24D13/12;H01L21/304 |
主分类号 |
B24B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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