发明名称 APPARATUS FOR BONDING CHIP ON WAFER PRECISELY
摘要 A chip lifting apparatus for lifting a semiconductor chip according to the present invention comprises: a first base member which is linearly formed; a second base member which is disposed in a direction perpendicular to the first base member; a chip lifting member which is installed on the second base member to be slidable; and a chip contact member which is provided to come in contact with a semiconductor chip. According to the present invention, when a plurality of semiconductor chips are divisionally disposed on a dicing tape, a semiconductor chip which as a target of bonding is separated and lifted from the other chips, thereby transferring only the bonding target chip.
申请公布号 KR20160068070(A) 申请公布日期 2016.06.15
申请号 KR20140172975 申请日期 2014.12.04
申请人 YEST CO., LTD. 发明人 YEO, WON JAE;KIM, TAE KYUNG
分类号 H01L21/677 主分类号 H01L21/677
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