| 摘要 |
The invention relates to a capacitive force sensor (1) having a base body (2), a flat, elastically yielding diaphragm body (3), two spacers (4) arranged at a distance from one another between the base body and the diaphragm body (3), wherein the diaphragm body (3) is supported on the base body (2) via the spacers (4a, 4b) and the diaphragm body (3) projects beyond at least one of the spacers (4a) and forms a free end (5) in the process, wherein a cavity (8) is formed between the diaphragm body (3) and the base body (2) in the region between the spacers (4a, 4b) in order to allow the diaphragm body (3) to bend when a force F acts on the diaphragm body (3) in the region between the spacers (4a, 4b), and wherein a first electrode is provided at the free end (5) and a second electrode (7) is provided on the base body, wherein the first and second electrodes define a measuring capacitor (9) with a measuring capacitance which changes with the action of force F, and means are also provided for making electrical contact (6) with the first and second electrodes. |
