| 摘要 |
PROBLEM TO BE SOLVED: To measure, with high precision, a size of a groove processed on an object surface by using only displacement data of the object surface measured by a displacement gage and excluding disturbance in the displacement data.SOLUTION: A surface shape measurement method includes: a swell removal step (step STP2) for removing a swell from displacement data obtained by scanning a surface of an object to acquire correction displacement data; a groove width calculation step (step STP3) for calculating a groove starting point and a groove terminal point of a groove from the correction displacement data; and a groove depth calculation step (step STP4) for calculating a difference between a minimum value of the displacement data limited to a width range of a prescribed ratio of a groove width from a middle position of the groove starting point and the groove terminal point and a displacement 0 of the correction displacement data, as a depth of the groove processed on the object surface. |
