| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical liquid volatilizer allowing facile replenishment of a chemical liquid into a chemical liquid container without detaching a wick member from the chemical liquid container, and furthermore preventing that the chemical liquid flows out to the outside even when the chemical liquid container has fallen. <P>SOLUTION: This chemical liquid volatilizer includes: the chemical liquid container 2; the wick member 3 sucking and volatilizing the chemical liquid; a holding member 4 provided in an upper opening 20 of the chemical liquid container 2, and holding the wick member 3 in a state that an upper end part of the wick member 3 is exposed outside the chemical liquid container 2; a cover member 5 provided on the holding member 4; and a cap 6 provided on the cover member 5. The holding member 4 has one or more inlets 46 through which the chemical liquid can be injected into the chemical liquid container 2. The cover member 5 can openably close the inlets 46 of the holding member 4, and has an insertion port 53 through which the upper end part of the wick member 3 is inserted. <P>COPYRIGHT: (C)2013,JPO&INPIT |
